Akiyama-Probe Specifications (typical values)

Cantilever
length: 310 µm, thickness: 3.7 µm, width: 30 µm each
n-type, highly doped silicon (0.01 ~ 0.025 Ω·cm)
Tip
AdvancedTEC™-like
tip radius: <15 nm, tip height: 28 µm
Force constant
5 N/m (Si cantilever part)
Tuning fork prongs
lTF = 2.4 mm, tTF = 100 µm, wTF = 220 µm
Resonance frequency
50 kHz

* All values are subject to change without notice.